In March 1995, SEMATECH sponsered a Compact Models Workshop to address the industry wide need for better compact models to address future technologies. The first day was devoted to presentations of several companies and the problems they forsaw.
The second day during the breakout sessions, an idea was proposed to standardize compact modeling. A standard compact model would benefit the industry. The highest interest was in compact MOS models. A set of preliminary benchmark tests were defined for verification. The effort for standardization had begun.
Here is a list of the resulting Compact Model Workshop meetings:
| Meeting date | Host | Developments from meeting |
| March 1st and 2nd, 1995 - Agenda | SEMATECH | Initial meeting, Presentations of companies concerns |
| June 1st, 1995 - Agenda | Texas Instruments | Presentations of API kits, IV data for model testing solicited, Initial testing resuested - Minutes |
| August 11th, 1995 - Agenda | National Semiconductor | Benchmark tests documented, Initial testing of BSIM3v3 and MOS9 |
| December 14th, 1995 - Agenda | SEMATECH | BSIM3v3 and MOS 9 testing presented, NIST model validation effort noted, BSIM3v3 chosen as first MOS model for standardization process, Compact Model Council chartered |
| March 21st and 22nd, 1996 - Agenda | Motorola | API kit roadmaping, BSIM3v3 improvements presented, Robustness improvement needs documented, Council co-chairs chosen, IEEE standardization process shown - Minutes |
| August 9th, 1996 - Agenda | IBM | Council requirements documented, Standardization issues discussed, Three teams formed to address BSIM3v3 technical issues, API Kit standardization, and find a home for the Compact Model Council - Minutes |
| December 8th, 1996 - Agenda | TI and Motorola | Promotional meeting for the Compact Model Council to announce EIA alignment and formation |
| April 10th, 1997 - Agenda | Motorola | First formal CMC meeting. EIA membership requirements for CMC discussed, new work for UC Berkeley proposed, API kit discussion determined a seperate meeting is required with simulator owners - Minutes |
| September 26th, 1997 - Agenda | Site: Dallas, TX | BSIM3v3 capacitance model reviewed, changes recommended for Isub, Validation suite discussed, 15 member companies present. Several action items for BSIM3v3 standardization and the validation suite of circuits. Minutes |
| December 12th, 1997 - Agenda | Site: Washington, DC | Reviewed action items for BSIM3v3 and began BSIM3v3.2 requirements. Discussed simulator specific options and standardization issues. Reviewed standards format and obtained project number for BSIM3v3. Minutes |
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